| 000 | 00758nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | rea00037261 | ||
| 005 | 20190704021705.0 | ||
| 008 | s2005 nyu e 001 0 eng d | ||
| 020 | _a0387233105 | ||
| 035 | _zNO CTRL | ||
| 039 |
_a37100 _cTLC |
||
| 245 | 0 | 0 |
_aElectroceramic - based mems : _bfabrication-technology and applications. |
| 260 |
_aNew York : _bSpringer, _c2005. |
||
| 300 |
_axii, 414 p : _bill ; _c22 cm. |
||
| 506 | _aOpen. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 700 | 1 | _aNava, Setter ed. | |
| 949 |
_aBMAIN _cTK7875 _d.E42 2005 C1 _g67546 _5N |
||
| 949 |
_aBMAIN _cTK7875 _d.E42 2005 C2 _g67547 _5N |
||
| 961 | _t1 | ||
| 999 |
_c25588 _d25588 |
||